# Channel: Height # Width: 1.990 µm # Height: 1.990 µm # Value units: m 9.8472e-011 1.3693e-010 2.2416e-010 2.1518e-010 2.0751e-010 1.5108e-010 2.1327e-010 2.7677e-010 -4.5801e-012 5.7605e-011 1.6855e-010 2.0833e-010 1.7563e-010 1.192e-010 3.9045e-011 -4.1108e-011 4.736e-010 6.0827e-010 5.5185e-010 5.9163e-010 6.5381e-010 3.8256e-010 5.4095e-010 8.43e-010 5.9704e-010 7.0799e-010 5.7907e-010 4.5147e-010 2.7643e-010 2.6744e-010 4.0211e-010 6.554e-010 6.2896e-010 6.1998e-010 4.9238e-010 3.1602e-010 2.5959e-010 2.2688e-010 1.9417e-010 2.3395e-010 7.6556e-010 8.5278e-010 8.2008e-010 6.4372e-010 3.9618e-010 1.2493e-010 -5.0116e-011 3.711e-011 1.1581e-009 1.364e-009 1.2364e-009 1.0126e-009 5.2649e-010 2.0779e-010 1.2764e-010 1.1865e-010 1.1322e-009 1.147e-009 9.9564e-010 6.7694e-010 2.8575e-010 1.5815e-010 5.5152e-012 9.2741e-011